Yield analysis of optical MEMS assembly process using a Monte Carlo simulation technique

Journal of Lightwave Technology

Volumn 23, Issue 2, 2005, Pages 510-516

  Badreldin, Tarek ^a,b   Saad, Tamer ^a,b   Khalil, Diaa ^a,c  

^a Egypt   (Egypt)

^b MENTOR GRAPHICS CORPORATION   (United States)

^c AIN SHAMS UNIVERSITY   (Egypt)

Author keywords

2 2 switch; Design for manufacturability; Monte Carlo simulation; Optical microelectromechanical systems (MEMS); Process capability

Indexed keywords

COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; MIRRORS; MONTE CARLO METHODS; OPTICAL DESIGN; STATISTICAL METHODS;

DESIGN-FOR-MANUFACTURABILITY; OPTICAL MICROELECTROMECHANICAL SYSTEMS; PROCESS CAPABILITY;

OPTICAL SWITCHES;

EID: 15744364905     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2004.842301     Document Type: Article

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