|
Volumn 83, Issue 12, 1998, Pages 7595-7607
|
Atomistic modeling of high-concentration effects of impurity diffusion in silicon
|
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 1542736444
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.367875 Document Type: Article |
Times cited : (10)
|
References (26)
|