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Volumn 83, Issue 12, 1998, Pages 7595-7607

Atomistic modeling of high-concentration effects of impurity diffusion in silicon

Author keywords

[No Author keywords available]

Indexed keywords


EID: 1542736444     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367875     Document Type: Article
Times cited : (10)

References (26)
  • 10
    • 0002734525 scopus 로고
    • edited by F. F. Y. Wang North-Holland, Amsterdam
    • R. B. Fair, in Impurity Doping Processes in Silicon, edited by F. F. Y. Wang (North-Holland, Amsterdam, 1981), p. 315.
    • (1981) Impurity Doping Processes in Silicon , pp. 315
    • Fair, R.B.1
  • 14
    • 84977586068 scopus 로고
    • Leipzig
    • A. Einstein, Ann. Phys. (Leipzig) 17, 549 (1905).
    • (1905) Ann. Phys. , vol.17 , pp. 549
    • Einstein, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.