A New Densitometer: Based on MEMS Silicon Microtube Technology

Sensors (Peterborough, NH)

Volumn 21, Issue 2, 2004, Pages 14-18

  Sparks, Douglas ^a   Najafi, Nader ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROTUBES; PORTABLE MULTIPLE-DRUG DELIVERY SYSTEMS;

COSTS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PRODUCT DESIGN; RESONATORS; SENSITIVITY ANALYSIS; SIGNAL TO NOISE RATIO; SILICON WAFERS;

DENSITOMETERS;

EID: 1542602993     PISSN: 07469462     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (7)

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3. Najafi, N., Y. Zhang, and S. Massoud-Ansari, "Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices," U.S. Patent No. 6,499,354.
4. Ruben, S. "Testing apparatus and method," U.S. Patent 1,570,781, 1926.
5. Sparks, D., et al., "A density/specific gravity meter based on silicon microtube technology," Proc Sensors Expo Fall 2002, Boston, MA, Sept. 2002, p. 171.
6. Tadigadapa, S., et al., "Micromachined fluidic apparatus," U.S. Patent No. 6,477,901, 2002.
7. Zhang, Y., S. Tadigadapa, and N. Najafi, "A micromachined Coriolis-force-based mass flowmeter for direct mass flow and fluid density measurements," Proc Transducers '01, 2001, p. 1460.