A large-angle and large-mirror microscanner based on thermal actuators

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 2907-2912

  Tu, Ching Chen ^a   Liu, Cheng Hsien ^a   Du, Chen Hsun ^b   Tsaur, Jiunn Jye ^b   Lee, Chengkuo ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b QIC Engineering Corp   (Taiwan)

Author keywords

Bimorph effect; MEMS; Microscanner; Thermal actuator

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ENERGY UTILIZATION; FINITE ELEMENT METHOD; MICROMACHINING; POLYAMIDES; PRODUCT DESIGN; RESIDUAL STRESSES; SELF ASSEMBLY; SILICA; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; THIN FILM DEVICES;

BIMORPH EFFECTS; MICROSCANNERS; THERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 1542516314     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Wu, M. C, 1997, "Micromachining for Optical and Optoelectronic Systems," Proc. IEEE, Vol. 85, No. 11, pp. 1833-1856.
2. Muller, R. S. and Lau, K. Y., 1998, "Surface-Micromachined Microoptical Element and Systems," Proc. IEEE, Vol. 86, No. 8, pp. 1705-1720.
3. Su, G. D. J., Lee, S. S., and Wu, M. C., 1999, "Optical Scanner Realized by Surface-Micromachined Vertical Torsion Mirror," IEEE Photonics Technology Letters, Vol. 11, No. 5, pp. 587-589.
4. Asada, N., Takeuchi, M., Vagnov, V., Belov, N., Hout, S. I., and Sluchak, I., 2000, "Silicon Micro-Optical Scanner," Sensors and Actuators, 83, pp. 284-290.
5. nd Imt. Conf. Micro, Electro, Opto, Mechanic Systems and Componets, Berlinm, pp 98-103.
6. Riethmütler, W. and Benecke, W., 1988, "Thermally Excited Silicon Microactuators," IEEE Transactions on Electron Devices, Vol. 35, No. 6, pp. 758-763.
7. Chu, W. H., Mehregany, M., and Mullen, R. L., 1993, "Analysis of Tip Deflection and Force of a Bimetallic Cantilever Microactuator," J. Micromech. Microeng., 3, pp. 4-7.
8. Schweizer, S., Calmes, S., Laudon, M., and Ph. Renaud, 1999, "Thermally Actuated Optical Microscanner with Large Angle and Low Consumption," Sensors and Actuators, 76, pp. 470-477.
9. Lin, G., Kim, C. J., Konishi, S., and Fujita, H., 1995, "Design, Fabrication, and Testing of a C-Shape Actuator," Transducers '95-Eurosensors.IX, Stockholm, Sweden, pp. 416-419.
10. Tsaur, J. J., Yang, S. I., Du C. H., Lin, Z. S., Huang, C. T. and Lee, C. K., "Development of TMAH Anisotropic Etching Manufacturing Process for MEMS", Proc. SPIE, vol.4174, pp. 142-153 (2000)
11. Incropera, F. P. and DeWitt, D. P., 1996, Fundamentals of heat and mass transfer 4th edit, Wiley, NY.
12. Vlklein, F., Min, G., Rowe, D. M., 1999, "Modelling of a Microelectromechanical Thermoelectric Cooler," Sensors and Actuators, 75. pp. 95-101.