Technology computer aided design characterization needs and requirements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 213-217

  Law, Mark E ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542501684     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589031     Document Type: Article

References (17)

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