Two microcantilever designs: Lumped-parameter model for static and modal analysis

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 41-50

  Lobontiu, Nicolae ^a   Garcia, Ephrahim ^a  

^a Cornell University   (United States)

Author keywords

Atomic force microscopy (AFM); Compliance stiffness; Lumped parameter model; Mass sensing; Microcantilever; Modal frequency

Indexed keywords

COMPUTER SIMULATION; DEFORMATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MODAL ANALYSIS; STIFFNESS;

COMPLIANCE; LUMPED PARAMETER MODEL; MASS SENSING; MICROCANTILEVER; MODAL FREQUENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542499835     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823239     Document Type: Article

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