Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology

Scanning

Volumn 20, Issue 3, 1998, Pages 219-220

  Lowney, J R ^a   Postek, M T ^a   Jones, S ^a   Mayo, S ^a   Cresswell, M ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542422320     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (1)

1. Lowney JR: Monte Carlo simulation of scanning electron microscope signals for lithographic metrology. Scanning 18, 301-306 (1996)