Surface effect humidity sensor based on alumina and porous silicon materials some electrical parameters, sensitivity and internal noises in comparison

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 633-640

  An, Dao Khac ^a   Mai, Le Hoang ^a  

^a INSTITUTE OF MATERIALS SCIENCE   (Viet Nam)

Author keywords

Humidity sensor; Internal noise of sensor; Porous Alumina; Porous silicon

Indexed keywords

ALUMINA; ANNEALING; ANODIC OXIDATION; ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; ELECTRIC CONDUCTIVITY; HYSTERESIS; PERMITTIVITY; POROUS SILICON; SPURIOUS SIGNAL NOISE; TRANSMISSION ELECTRON MICROSCOPY;

HUMIDITY SENSORS; INTERNAL NOISE OF SENSORS; POROUS ALUMINA;

SENSORS;

EID: 1542378319     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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