Jet-printed Lithography for Semiconductor Device Fabrication

International Conference on Digital Printing Technologies

Volumn , Issue , 2002, Pages 450-452

  Wong, William S ^a   Ready, S E ^a   Ho, J ^a   Lu, J P ^a   Street, R A ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGER ARRAYS; PRINTHEADS; WAX-MASK PROCESS;

ELECTRIC POTENTIAL; GATES (TRANSISTOR); IMAGE SENSORS; LEAKAGE CURRENTS; LIQUID CRYSTAL DISPLAYS; PHASE TRANSITIONS; PRINTING; THIN FILM TRANSISTORS; WETTING;

PHOTOLITHOGRAPHY;

EID: 1542375765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. M. Sanada, K. Nakano, and M. Matsunaga, Jpn. J. Appl. Phys. Part 2 37, L1448 (1998).
2. F. Garnier, R. Hajlaoui, A. Yassar, and P. Srivastava, Science 265, 1684 (1994).
3. A. Bao, Y. Feng, A. Dodabalapur, V.R. Raju, and A.J. Lovinger, Chem. Mater. 9, 1299 (1997) 1299.
4. S.-C. Chang, J. Bharathan, and Y. Yang, R. Helgeson, F. Wudl, M.B. Ramey and J. R. Reynolds, Appl. Phys. Lett. 73, 2561 (1998).
5. G. Perçin, T.S. Lundgren, and B.T. Khuri-Yakub, Appl. Phys. Lett. 73, 2375 (1998).
6. E. Y. Ma and S. Wagner, Mat. Res. Soc. Proc. 507, 13 (1998).
7. H. Gleskova, S. Wagner, and D.S. Shen, J. Non-Cryst. Solids 227-230 1217 (1998).
8. H. Gleskova, R. Könenkamp, S. Wagner, and D. Shen, Electron. Device Lett. 17, 264 (1996).
9. D.J. Hayes, W. R. Cox, and M. E. Grove, J. Electron. Manuf. 8, 209 (1998).
10. S. A. Elrod, B. Hadimioglu, B. T. Khuri-Yakub, E. G. Rawson, E. Richley, C. F. Quate, N. N. Mansour, and T. S. Lundgren, J. Appl. Phys. 65 (1989) 3441.