FIB Micro-Surgery on Flip-Chips From the Backside

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1998, Pages 455-459

  Lee, R ^a   Antoniou, N ^a  

^a Micrion Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLIP-CHIPS; FOCUSED ION BEAMS (FIB);

COMPUTER AIDED DESIGN; DATABASE SYSTEMS; ELECTRONICS PACKAGING; FAILURE ANALYSIS; INTEGRATED CIRCUITS; ION BEAMS; SILICON; SURGERY; THICKNESS MEASUREMENT;

FLIP CHIP DEVICES;

EID: 1542360765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. R. H. Livengood, V. R. Rao, "FIB Techniques to Debug Flip-Chip Integrated Circuits:, Semiconductor International, March 1998.
2. N. Antoniou, "Focused Ion Beam Systems Keep Pace", European Semiconductor, February 1998.