Ion irradiation effects on the mechanical stability of compressed metallic thin films

Applied Physics Letters

Volumn 84, Issue 6, 2004, Pages 894-896

  Goudeau, P ^a   George, M ^a   Coupeau, C ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; SILICON WAFERS; SPUTTER DEPOSITION; SUBSTRATES;

ION BEAM IRRADIATION; MECHANICAL STABILITY; METALLIC THIN FILM; POLYCRYSTALLINE MOLYBDENUM THIN FILM;

THIN FILMS;

EID: 1542315168     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1645981     Document Type: Article

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