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Volumn 773, Issue , 2003, Pages 55-60
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MEMS Tactile Sensors for Surgical Instruments
a,b a a |
Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
DEGRADATION;
DEPOSITION;
MACHINING;
REACTIVE ION ETCHING;
SENSORS;
STRAIN GAGES;
SURGERY;
SURGICAL EQUIPMENT;
ULTRASONIC MACHINE TOOLS;
COST SAVINGS;
DEEP REACTIVE ION ETCHING (DRIE);
SURGICAL TOOLS;
MICROELECTROMECHANICAL DEVICES;
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EID: 1542304499
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-773-n11.5 Document Type: Conference Paper |
Times cited : (7)
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References (4)
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