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Volumn 1, Issue 2, 2002, Pages 1154-1159

Energy Trapping in Mesa-Shaped Quartz Crystal Microbalance

Author keywords

Energy trapping; Mesa; Quartz crystal microbalance; Thickness shear

Indexed keywords

BENDING STRENGTH; ELECTRODES; MICROMACHINING; OPTIMIZATION; PLATES (STRUCTURAL COMPONENTS); PROBLEM SOLVING; RESONATORS; THICKNESS MEASUREMENT; VIBRATIONS (MECHANICAL);

EID: 1542301489     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (10)
  • 1
    • 0033333283 scopus 로고    scopus 로고
    • Experimental study of vibrations of mesa-shaped AT-cut quartz plates
    • S. Goka, H. Sekimoto and Y. Watanabe, "Experimental study of vibrations of mesa-shaped AT-cut quartz plates," Proc. 1999 IEEE Int. Freq. Contr. Symp., vol. 1, pp. 441-444, 1999.
    • (1999) Proc. 1999 IEEE Int. Freq. Contr. Symp. , vol.1 , pp. 441-444
    • Goka, S.1    Sekimoto, H.2    Watanabe, Y.3
  • 2
    • 0031249725 scopus 로고    scopus 로고
    • AT-cut quartz resonators with inverted-mesa electrodes
    • Oct.
    • K. Hirama, Y. Aoyama and M. Naito, "AT-cut quartz resonators with inverted-mesa electrodes," Jpn. J. Appl. Phys., vol. 36, no. 10, pp. 6432-6436, Oct. 1997.
    • (1997) Jpn. J. Appl. Phys. , vol.36 , Issue.10 , pp. 6432-6436
    • Hirama, K.1    Aoyama, Y.2    Naito, M.3
  • 4
    • 0032317918 scopus 로고    scopus 로고
    • Three-dimensional analysis for rectangular AT-cut quartz plates with bi-mesa structure
    • H. Sekimoto, S. Goka and Y. Watanabe, "Three-dimensional analysis for rectangular AT-cut quartz plates with bi-mesa structure," Proc. 1998 IEEE Int. Freq. Contr. Symp., pp. 964-967, 1998.
    • (1998) Proc. 1998 IEEE Int. Freq. Contr. Symp. , pp. 964-967
    • Sekimoto, H.1    Goka, S.2    Watanabe, Y.3
  • 5
    • 0033688009 scopus 로고    scopus 로고
    • Effect of stepped bi-mesa structures on spurious vibrations of AT-cut quartz plates
    • May
    • S. Goka, A. Ishizaki, H. Sekimoto and Y. Watanabe, "Effect of stepped bi-mesa structures on spurious vibrations of AT-cut quartz plates, " Jpn. J. Appl. Phys., vol. 39, no. 5B, pp. 3054-3055, May 2000.
    • (2000) Jpn. J. Appl. Phys. , vol.39 , Issue.5 B , pp. 3054-3055
    • Goka, S.1    Ishizaki, A.2    Sekimoto, H.3    Watanabe, Y.4
  • 6
    • 0034447494 scopus 로고    scopus 로고
    • Decoupling effect of stepped mesa structures on spurious vibrations of AT-cut quartz plates
    • S. Goka, H. Sekimoto and Y. Watanabe, "Decoupling effect of stepped mesa structures on spurious vibrations of AT-cut quartz plates," Proc. 2000 IEEE/EIA Int. Freq. Contr. Symp., pp. 397-400, 2000.
    • (2000) Proc. 2000 IEEE/EIA Int. Freq. Contr. Symp. , pp. 397-400
    • Goka, S.1    Sekimoto, H.2    Watanabe, Y.3
  • 7
    • 0033199947 scopus 로고    scopus 로고
    • Multichannel quartz crystal microbalance
    • Sep.
    • T. Tatsuma, Y. Watanabe, N. Oyama, K. Kitakizaki and M. Haba, "Multichannel quartz crystal microbalance," Aanl. Chem., vol. 71, no. 17, pp. 3632-3636, Sep. 1999.
    • (1999) Aanl. Chem. , vol.71 , Issue.17 , pp. 3632-3636
    • Tatsuma, T.1    Watanabe, Y.2    Oyama, N.3    Kitakizaki, K.4    Haba, M.5
  • 8
    • 0033733557 scopus 로고    scopus 로고
    • One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE
    • May
    • T. Abe and M. Esashi, "One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE," Sens. Actuators A, vol. 82, nos. 1-3, pp. 139-143, May 2000.
    • (2000) Sens. Actuators A , vol.82 , Issue.1-3 , pp. 139-143
    • Abe, T.1    Esashi, M.2
  • 9
    • 0000060884 scopus 로고
    • Thickness-shear and flexural vibrations of partially plated, crystal plates
    • R. D. Mindlin and P. C. Y. Lee, "Thickness-shear and flexural vibrations of partially plated, crystal plates," Int. J. Solids Structures, vol. 2, pp. 125-139, 1966.
    • (1966) Int. J. Solids Structures , vol.2 , pp. 125-139
    • Mindlin, R.D.1    Lee, P.C.Y.2
  • 10
    • 0001321760 scopus 로고
    • Thickness-shear and flexural vibrations of crystal plates
    • D. Mindlin, "Thickness-shear and flexural vibrations of crystal plates," J. Appl. Phys., vol. 22, no. 3, pp. 316-323, 1951.
    • (1951) J. Appl. Phys. , vol.22 , Issue.3 , pp. 316-323
    • Mindlin, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.