Automatic Determination of Optimal FIB Operations for Improved Circuit Probing and Fast Reconfiguration

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2000, Pages 407-414

  Desplats, Romain ^a   Dargnies, Timothee ^a   Courrege, Jean Christophe ^a   Perdu, Philippe ^a   Noullet, Jean Louis ^b  

^a CNES   (France)

^b AIME   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; COMPUTER SOFTWARE; ELECTRIC LINES; ELECTRON BEAMS; INTEGRATED CIRCUIT LAYOUT; LASER APPLICATIONS; POLYSILICON;

ELECTRON BEAM TESTER (EBT); FOCUSED ION BEAM (FIB);

ION BEAMS;

EID: 1542300779     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Merlin Framework Software User Manual Automatic Probe Placement, © Knights Technologies 1989-1998.
2. IDS e-beam system Software User Manual Optimal Probe Point Placement, © Schlumberger ATE Technologies 1990-1998.