Deposition of AlN thin films on silicon by DC magnetron reactive sputtering

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

Volumn 27, Issue 1, 2005, Pages 53-55

  Yu, Yi ^a   Zhao, Hong Jin ^a   Gao, Zhan You ^a   Ren, Tian Ling ^a   Liu, Li Tian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

AlN thin film; DC magnetron reactive sputtering; Preferential orientation

Indexed keywords

EID: 15044359285     PISSN: 10042474     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)