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Volumn 290-291 PART 1, Issue , 2005, Pages 779-782
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Magnetic structure of cross-shaped permalloy arrays embedded in silicon wafers
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Author keywords
Damascene technique; Magnetic force microscope; Magnetic structure; Micromagnetic simulation
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Indexed keywords
CHEMICAL MECHANICAL POLISHING;
DATA STORAGE EQUIPMENT;
DRY ETCHING;
ELECTRON BEAM LITHOGRAPHY;
INTEGRAL EQUATIONS;
SILICON WAFERS;
SPIN COATING;
DAMASCENE TECHNIQUE;
MAGNETIC FORCE MICROSCOPES;
MAGNETIC STRUCTURE;
MICORMAGNETIC SIMULATION;
NICKEL ALLOYS;
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EID: 15044357556
PISSN: 03048853
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmmm.2004.11.404 Document Type: Conference Paper |
Times cited : (12)
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References (4)
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