Resonant-wavelength tuning of microring filters by oxygen plasma treatment

IEEE Photonics Technology Letters

Volumn 17, Issue 3, 2005, Pages 582-584

  Wang, Tzyy Jiann ^a   Huang, Yen Hao ^a   Chen, Hsuen Li ^b  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Integrated optics; Microring filter; Wavelength tuning

Indexed keywords

INTEGRATED OPTICS; IONS; LIGHT POLARIZATION; LIGHT PROPAGATION; OPTICAL WAVEGUIDES; PHOTORESISTS; PLASMA APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; REFRACTIVE INDEX; SILICON NITRIDE;

MICRORING FILTER; OXYGEN PLASMA TREATMENT; RIDGE WAVEGUIDE; WAVELENGTH TUNING;

OPTICAL FILTERS;

EID: 14844367101     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.840921     Document Type: Article

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