A simple and low-cost fabrication of polymeric vertical microlens using dip method

IEEE Photonics Technology Letters

Volumn 17, Issue 3, 2005, Pages 603-605

  Yang, Chih Chao ^a   Peng, Te Chin ^a   Huang, Yun Hsun ^a   Wu, Meng Chyi ^a   Ho, Chong Long ^b   Ho, Wen Jeng ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CHUNGHWA TELECOM CO LTD   (Taiwan)

Author keywords

Dip method; Polymer; SU 8; Vertical microlens

Indexed keywords

LASER BEAMS; MICROOPTICS; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; REFRACTIVE INDEX; RELIABILITY; SILICON WAFERS; SINGLE MODE FIBERS; THERMODYNAMIC STABILITY;

DIP METHOD; VERTICAL MICROLENS;

MICROLENSES;

EID: 14844357493     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.842316     Document Type: Article

References (5)

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