Study on the preparation of high barrier hydrogenated carbon film and its properties

Wuli Xuebao/Acta Physica Sinica

Volumn 54, Issue 2, 2005, Pages 818-823

  Chen, Guang Liang ^a,b   Ge, Yuan Jing ^b   Zhang, Yue Fei ^b   Zhang, Guang Qiu ^b   Zhang, Gu Ling ^a   Wang, Jiu Li ^a   Liu, Yuan Fu ^a   Gu, Wei Chao ^a   Feng, Wen Ran ^a   Liu, Chi Zi ^a   Yang, Si Ze ^a  

^a INSTITUTE OF PHYSICS   (China)

^b BEIJING INSTITUTE OF GRAPHIC COMMUNICATION   (China)

Author keywords

Barrier property; Hydrogenated carbon film; PET; r.f. PECVD

Indexed keywords

EID: 14844347687     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)