Interface mixing induced by swift heavy ions at metal-oxide/silicon interfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 240-245

  Schattat, B ^a,b   Bolse, W ^a   Elsanousi, A ^a   Renz, T ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Ion beam mixing; Nuclear tracks; Swift heavy ions

Indexed keywords

CHEMICAL REACTIONS; CRYSTALLIZATION; DEGRADATION; DEPOSITION; ENERGY TRANSFER; INTERFACES (MATERIALS); ION BEAMS; MAGNETRON SPUTTERING; MIXING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TITANIUM DIOXIDE; X RAY DIFFRACTION;

INTERFACE MIXING; ION BEAM MIXING; NUCLEAR TRACKS; SWIFT HEAVY ION;

HEAVY IONS;

EID: 14744303583     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.048     Document Type: Conference Paper

References (9)

1. F. Studer, M. Hervieu, J.-M. Constantini, and M. Toulemonde Nucl. Instr. and Meth. B 122 1997 449
2. R.L. Fleischer, P.B. Price, and R.M. Walker Nuclear Tracks in Solids, Chapter 1 1975 University of California Press
3. G. Xiao, G. Schiwietz, P.L. Grande, N. Stolterfoht, A. Schmoldt, M. Grether, R. Köhrbrück, A. Spieler, and U. Stettner Phys. Rev. Lett. 79 1997 1821
4. F. Seitz, and J.S. Koehler Solid State Phys. 2 1956 305
5. Z.G. Wang, Ch. Dufour, E. Paumier, and M. Toulemonde J. Phys. Condens. Matter 6 1994 6733
6. M. Toulemonde, J.M. Constantini, Ch. Dufour, A. Meftah, E. Paumier, and F. Studer Nucl. Instr. and Meth. B 116 1996 37
7. W. Bolse, and B. Schattat Nucl. Instr. and Meth. B 209 2003 32
8. W.L. Johnson, Y.T. Cheng, M. van Rossum, and M.-A. Nicolet Nucl. Instr. and Meth. B 7-8 1985 657
9. W. Bolse, B. Schattat, A. Feyh, and T. Renz Nucl. Instr. and Meth. B 218 2004 80