Development and evaluation of a micro chemical gas sensor with an inner-circulation diffuser pump

Sensors and Actuators, B: Chemical

Volumn 103, Issue 1-2, 2004, Pages 369-374

  Yamaguchi, Noritomo ^a   Yang, Ming ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Chemical gas sensor; Diffuser pump; Inner circulation; Miniaturization

Indexed keywords

CHLORINE; DIFFUSERS (OPTICAL); ELECTRIC POTENTIAL; ELECTROCHEMISTRY; ETCHING; MEMBRANES; MICROMACHINING; PHOTOLITHOGRAPHY; SILICON; SPECIFIC HEAT;

CHEMICAL GAS SENSORS; DIFFUSER PUMPS; INNER-CIRCULATION; MINIATURIZATION;

CHEMICAL SENSORS;

EID: 14744297676     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.04.085     Document Type: Conference Paper

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