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Applied Physics Letters

Volumn 65, Issue 5, 1994, Pages 537-539

Nonlocal electron kinetics in a low-pressure inductively coupled radio-frequency discharge

(4) Kolobov, V I a Beale, D F a Mahoney, L J a Wendt, A E a

a UNIVERSITY OF WISCONSIN MADISON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 14544281839 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.112290 Document Type: Article

Times cited : (53)

References (11)

1
- 84951891573
- (Academic, New York, 1994)
- Physics of Thin Films , vol.18 , pp. 1-119
- Lieberman, M.A.¹ Francombe, M.² Gottscho, R.A.³

2
- 84951896391
- By EDF we denote the density in the phase space that coincides with the second derivative of probe current with respect to probe potential

3
- 0000915643
- (1993) Appl. Phys. Lett , vol.63 , pp. 3137
- Godyak, V.A.¹ Piejak, R.B.²

4
- 0003580852
- (Pergamon Press, Oxford)
- (1981) Physical Kinetics, Course of Theoretical Physics , vol.10
- Lifshitz, E.M.¹ Pitaevskii, L.P.²

5
- 3343015590
- (1993) Phys. Rev. Lett , vol.71 , pp. 1844
- Turner, M.M.¹

6
- 36149002965
- (1954) Phys. Rev , vol.94 , pp. 1475
- Bernstein, I.B.¹ Holstein, T.²

7
- 0001135699
- (1974) Zh. Eksp. Teor. Fiz , vol.66 , pp. 1638
- Tsendin, L.D.¹

8
- 0001510516
- (1974) Sov. Phys. JETP , vol.39 , pp. 805
- Tsendin, L.D.¹

9
- 0026847210
- (1992) IEEE Trans. Plasma Sci , vol.20 , pp. 66
- Kaganovich, I.D.¹ Tsendin, L.D.²

10
- 84951885747
- (unpublished)
- Mahoney, L.J.¹ Wend’t, A.E.² Richards, C.J.³ Barrios, E.⁴ Shohet, J.L.⁵

11
- 84951886081
- (to be published)
- J. Vac. Sci. Technol. A
- Beale, D.A.¹ Wendt, A.E.² Mahoney, L.J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.