메뉴 건너뛰기




Volumn , Issue , 2004, Pages 169-175

MEMS solutions for precision micro-fluidic dispensing application

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; IMAGE QUALITY; INK; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES;

EID: 14244249264     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (3)
  • 1
    • 0020127035 scopus 로고
    • Silicon as a mechanical material
    • Kurt E. Peterson, "Silicon as a Mechanical Material", Proc. IEEE, 70, 5, p.420-457, (1982).
    • (1982) Proc. IEEE , vol.70 , Issue.5 , pp. 420-457
    • Peterson, K.E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.