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Journal of Applied Physics

Volumn 67, Issue 3, 1990, Pages 1542-1553

Oxidation of metastable single-phase polycrystalline Ti 0.5Al0.5N films: Kinetics and mechanisms

(5) McIntyre, D a Greene, J E a Hakansson G b Sundgren, J E b Munz W D c

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b LINKÖPING UNIVERSITY (Sweden)

c EVONIK INDUSTRIES AG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 13944274472 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.345664 Document Type: Article

Times cited : (523)

References (38)

1
- 0000129717
- See for example
- (1985) Thin Solid Films , vol.126 , pp. 257
- Sproul, W.D.¹ Rothstein, R.²

2
- 0020269597
- (1982) Proc. SPIE , vol.324 , pp. 52
- Karlsson, B.¹ Ribbing, C.-G.²

3
- 0019586344
- (1982) Thin Solid Films , vol.93 , pp. 397
- Wittmer, M.¹ Melchior, H.²

4
- 0037878291
- (1979) Oxid. Met. , vol.13 , pp. 05
- Desmaison, J.¹ Lefort, P.² Billy, M.³

5
- 0019633490
- (1981) J. Appl. Phys. , vol.52 , pp. 6659
- Wittmer, M.¹ Noser, J.² Melchior, H.³

6
- 0020748299
- (1983) J. Electrochem. Soc. , vol.130 , pp. 1210
- Suni, I.¹ Sigurd, D.² Ho, K.T.³ Nicolet, M.-A.⁴

7
- 84950583764
- (1959) Z. Phys. Chem. N. F. , vol.13 , pp. 59
- Münster, A.¹ Schlamp, G.²

8
- 0002995280
- (1975) Prog. Solid State Chem. , vol.10 , pp. 17
- Smeltzer, W.W.¹ Young, D.J.²

9
- 0018480133
- (1979) Oxid. Met. , vol.13 , pp. 203
- Desmaison, J.¹ Lefort, P.² Billy, M.³

10
- 0022451398
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2695
- Knotek, O.¹ Böhmer, M.² Leyendecker, T.³

11
- 0022489380
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2701
- Jehn, H.A.¹ Hoffman, S.² Ruckborn, V.-A.³ Münz, W.D.⁴

12
- 25544459890
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2717
- Münz, W.D.¹

13
- 0024036421
- (1988) Surf. Interface Anal. , vol.12 , pp. 329
- Hoffman, S.¹ Jehn, H.A.²

14
- 0002440967
- (1986) AIP Conf. Proc. Ser. , vol.149 , pp. 95
- Sundgren, J.E.¹ Johansson, B.O.² Rockett, A.³ Barnett, S.A.⁴ Greene, J.E.⁵

15
- 0003689862
- edited by T. B. Massalski, J. L. Murray, L. H. Bennett, and H. Baker (American Society for Metals, Metals Park, OH)
- (1986) Binary Alloy Phase Diagrams , vol.1 , pp. 819
- Wriedt, H.A.¹

16
- 0021464129
- (1984) J. Solid State Chem. , vol.53 , pp. 260
- Schuster, J.C.¹ Bauer, J.²

17
- 0023438628
- (1987) Thin Solid Films , vol.153 , pp. 55
- Hakansson, G.¹ Sundgren, J.-E.² McIntyre, D.³ Greene, J.E.⁴ Münz, W.D.⁵

18
- 84915940534
- (Kevex, Foster City, CA).
- (1980) Quantex Instruction Manual
- Colby, J.W.¹

19
- 0001413804
- (1983) Surf. Sci. , vol.128 , pp. 265
- Sundgren, J.-E.¹ Johansson, B.O.² Karlsson, S.-E.³

20
- 0001252772
- (1985) Surf. Sci. , vol.149 , pp. 105
- Dawson, P.T.¹ Tzatzov, K.K.²

21
- 0017517693
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 1023
- Mathieu, H.J.¹ Mathieu, J.B.² McClure, D.E.³ Landolt, D.⁴

22
- 84986506427
- (1986) J. Electron Microsc. Tech. , vol.4 , pp. 361
- Helmersson, V.¹ Sundgren, J.E.²

23
- 0003482733
- edited by T. Itoh (Elsevier, Amsterdam), Chap. 5.
- (1988) Ion‐Beam Assisted Film Growth
- Greene, J.E.¹ Barnett, S.A.² Sundgren, J.-E.³ Rockett, A.⁴

24
- 0037997768
- compiled by JCPDC International Centre for Diffraction Data (Swarthmore, PA).
- (1982) Powder Diffraction File

25
- 85013699221
- (1955) Corrosion , vol.11 , pp. 366t
- Smeltzer, W.W.¹

26
- 0020252630
- (1982) J. Appl. Phys. , vol.53 , pp. 8809
- Yan, M.F.¹ Rhodes, W.W.²

27
- 0002549784
- (1967) Corros. Sci. , vol.7 , pp. 1
- Beck, A.F.¹ Heine, M.A.² Paule, E.J.³ Pryor, M.J.⁴

28
- 0000046675
- (1961) J. Electrochem. Soc. , vol.108 , pp. 1097
- Sleppy, W.E.¹

29
- 0001350725
- (1987) Rep. Prog. Phys. , vol.50 , pp. 861
- Stott, F.H.¹

30
- 0004026140
- edited by R. A. Rapp (National Association of Corrosion Engineers, Houston)
- (1983) High Temperature Corrosion , pp. 89
- Kröger, F.A.¹

31
- 0003610721
- (Wiley‐Interscience, New York)
- (1972) Nonstoichiometry, Diffusion, and Electrical Conductivity in Binary Metal Oxides , pp. 346
- Kofsted, P.¹

32
- 84957274745
- (1987) J. Vac. Sci. Technol. , vol.5 , pp. 1335
- Katnani, A.D.¹ Papathomas, K.I.²

33
- 84950586913
- Bull. Soc. Chim. 836.
- (1963)
- Guiochon, G.¹ Jacqué, L.²

34
- 0020778679
- (1983) Ceram. Int. , vol.9 , pp. 80
- Lavrenko, V.A.¹ Alexeev, A.F.²

35
- 50549169786
- (1961) Acta Metall. , vol.9 , pp. 880
- Smeltzer, W.W.¹ Haering, R.R.² Kirkaldy, J.S.³

36
- 0003882186
- P. Harvey, Ed, (American Society for Metals, Metals Park, OH)
- (1982) Engineering Properties of Steels , pp. 304

37
- 0022489379
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2661
- Holleck, H.¹

38
- 84950586914
- The molar volumes of rutile‐structure [Formula Omitted] and [Formula Omitted] are 18.8 and [Formula Omitted] respectively, while that of TiN is [Formula Omitted] Based upon measured lattice constants and atomic radii, the molar volume of [Formula Omitted] is expected to be approximately [Formula Omitted] Molar volumes of other related Ti‐ and Al‐based oxides are β‐TiO [Formula Omitted] [Formula Omitted] [Formula Omitted] [Formula Omitted] [Formula Omitted] and [Formula Omitted] [Formula Omitted] Molar volumes and oxides and TiN are taken from O. Kubaschewski and B. E. Hopkins, Oxidation of Metals and Alloys2nd ed. (Butterworths, London)
- (1962) , pp. 9-16

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