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Volumn 476, Issue 1, 2005, Pages 79-83
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Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition
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Author keywords
Deposition process; Ion bombardment; Magnesium oxide; Thin films
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DEPOSITION;
ION BEAM ASSISTED DEPOSITION;
ION BOMBARDMENT;
MAGNESIA;
SUBSTRATES;
SURFACE ROUGHNESS;
SYNTHESIS (CHEMICAL);
DEPOSITION PROCESS;
FULL-WIDTH HALF MAXIUM (FWHM);
ION BEAM ANGLE;
THIN FILMS;
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EID: 13844281621
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2004.09.018 Document Type: Article |
Times cited : (11)
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References (14)
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