Electron beam brightness from negative-electron-affinity photocathodes for scanning electron microscopy application

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 8335-8340

  Ohshima, Takashi ^a   Kudo, Makoto ^a  

^a HITACHI LTD   (Japan)

Author keywords

Angular current density; Brightness; Electron beam; MBE; NEA; Photocathode; SEM; Source size

Indexed keywords

BIOTECHNOLOGY; CURRENT DENSITY; MOLECULAR BEAM EPITAXY; MONOCHROMATORS; OPTIMIZATION; PHOTOCATHODES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE;

ANGULAR CURRENT DENSITY; BRIGHTNESS; NEGATIVE-ELECTRON-AFFINITY (NEA); SOURCE SIZES;

ELECTRON BEAMS;

EID: 13644279547     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.8335     Document Type: Article

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