Ellipsometric complex for studying rapidly-running high-temperature processes

Avtometriya

Volumn 40, Issue 6, 2004, Pages 61-69

  Shvets, V A ^a   Chikichev, S I ^b   Prokop'ev, V Yu ^b   Rykhlitskij, S V ^b   Spesivtsev, E V ^b  

^a Inst Fiziki Poluprovodnikov   (Russian Federation)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; GERMANIUM; HEATING; HIGH TEMPERATURE TESTING; OPTICAL PROPERTIES; POLARIMETERS; THIN FILMS;

HEATING MODES; MELTING TEMPERATURE REDUCTION; RAPIDLY RUNNING PROCESSES;

ELLIPSOMETRY;

EID: 13644260292     PISSN: 03207102     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)