Development of electron optical instrument for evaluation of multi emitters - Real time observation of operating conditions of multi emitters by LEEM, PEEM and FEEM

Technical Digest of the 17th International Vacuum Nanoelectronics Conference, IVNC 2004

Volumn , Issue , 2004, Pages 188-189

  Murata, H ^a   Kimura, T ^a   Nishimura, Y ^a   Shimoyama, H ^a   Mogami, A ^b   Sakai, Y ^b   Kudo, M ^b   Kato, M ^b   Betsui, K ^c   Inoue, K ^c  

^a MEIJO UNIVERSITY   (Japan)

^b JEOL LTD   (Japan)

^c FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; ELECTRON BEAMS; ELECTRON EMISSION; ELECTRON IRRADIATION; ELECTRON MICROSCOPY; FIELD EMISSION DISPLAYS; REAL TIME SYSTEMS; ULTRAVIOLET RADIATION;

EMISSION CURRENT STABILITY; EMISSION PATTERNS; FIELD EMITTERS; MULTI EMITTER;

ELECTROOPTICAL DEVICES;

EID: 13644257844     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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