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Volumn 281-282, Issue 1-2, 1996, Pages 68-72

Monte Carlo simulation of the variation of a binary alloy film composition due to intrinsic resputtering using different working gases

Author keywords

Alloys; Copper; Deposition process; Lead; Sputtering

Indexed keywords

ATOMS; BACKSCATTERING; BINARY ALLOYS; BINDING ENERGY; COMPUTER SIMULATION; COPPER ALLOYS; ENERGY TRANSFER; GASES; MONTE CARLO METHODS; SPUTTER DEPOSITION; THIN FILMS;

EID: 13544271358     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08577-X     Document Type: Article
Times cited : (2)

References (16)
  • 7
    • 0043010209 scopus 로고
    • National Institute of Fusion Research, Chikusa-Ku, Nagoya 4645-01, Japan
    • Y. Yamamura, T. Takiguchi and H. Tawara, Report NIFS-DATA-1, National Institute of Fusion Research, Chikusa-Ku, Nagoya 4645-01, Japan, 1990.
    • (1990) Report NIFS-DATA-1
    • Yamamura, Y.1    Takiguchi, T.2    Tawara, H.3
  • 16
    • 0003844828 scopus 로고
    • Institute of Plasma Physics, Nagoya University, Chikusa-ku, Nagoya 464, Japan
    • Y. Yamamura, Y. Itikawa and N. Itoh, Report IPPJ-AM-26, Institute of Plasma Physics, Nagoya University, Chikusa-ku, Nagoya 464, Japan, 1983.
    • (1983) Report IPPJ-AM-26
    • Yamamura, Y.1    Itikawa, Y.2    Itoh, N.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.