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Volumn 281-282, Issue 1-2, 1996, Pages 68-72
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Monte Carlo simulation of the variation of a binary alloy film composition due to intrinsic resputtering using different working gases
a a a a a |
Author keywords
Alloys; Copper; Deposition process; Lead; Sputtering
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Indexed keywords
ATOMS;
BACKSCATTERING;
BINARY ALLOYS;
BINDING ENERGY;
COMPUTER SIMULATION;
COPPER ALLOYS;
ENERGY TRANSFER;
GASES;
MONTE CARLO METHODS;
SPUTTER DEPOSITION;
THIN FILMS;
ATOMIC SIZE;
ENERGETIC PARTICLES;
GAS PHASE TRANSPORT;
INTRINSIC RESPUTTERING;
METALLIC FILMS;
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EID: 13544271358
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(96)08577-X Document Type: Article |
Times cited : (2)
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References (16)
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