Preparation of Cr-Si multilayer structures for thin film heater applications

Thin Solid Films

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 235-238

  Cho, Nam Ihn ^a   Kim, Min Chul ^a  

^a SunMoon University   (South Korea)

Author keywords

Magnetron sputtering; Semiconductor processing; Temperature coefficient of resistance; Thin film

Indexed keywords

ANNEALING; CHROMIUM; COMPOSITION; DEGASSING; ELECTRIC HEATING ELEMENTS; MAGNETRON SPUTTERING; METALLIC FILMS; MULTILAYERS; SILICON; SPUTTERING; THERMAL EFFECTS; THERMODYNAMICS;

CHROME-RICH FILMS; SEMICONDUCTOR PROCESSING; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE UNIFORMITY;

THIN FILMS;

EID: 13444293085     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.015     Document Type: Conference Paper

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