Reduction of TiO2 assisted by a microwave plasma at atmospheric pressure

Thin Solid Films

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 63-67

  Huet, S ^a   Belmonte, T ^a   Thiebaut J M ^a   Bockel, S ^b   Michel, H ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b AIR LIQUIDE   (France)

Author keywords

Atmospheric pressure plasma; Surface treatment; Titanium dioxide reduction

Indexed keywords

ATMOSPHERIC PRESSURE; BINDING ENERGY; CONCENTRATION (PROCESS); HYDROGEN; MICROWAVES; REDUCTION; SUBSTRATES; SURFACE TREATMENT; X RAY DIFFRACTION ANALYSIS;

ATMOSPHERIC PRESSURE PLASMA; RESONANT CAVITY; TITANIUM DIOXIDE REDUCTION;

TITANIUM OXIDES;

EID: 13444269424     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.065     Document Type: Conference Paper

References (22)

1. M.J. de Graaf, R.J. Severens, L.J. Van Izendoorn, F. Munnik, H.J.M. Meijers, H. Kars, M.C.M van de Sanden, and D.C. Schram Surf. Coat. Technol. 74/75 1995 351
2. K.T. Jacob, A. Chandran, and R.M. Mallya Z. Met.kd. 91 5 2000 401
3. L. Bardos, and H. Barankova Surf. Coat. Technol. 133 2000 522
4. G. Bruno, P. Capezzuto, and M. Losurdo Phys. Rev., B 54 23 1996 17175
5. R. Kroon Jpn. J. Appl. Phys. 36 8 1997 5068
6. F. Brecelj, and M. Mozetic Vacuum 40 1-2 1990 177
7. Y. Sakamoto, and Y. Ishibe Jpn. J. Appl. Phys. 19 5 1980 839
8. T. Belmonte, J.M. Thiébaut, H. Michel, R.P. Cardoso, and A. Maliska J. Vac. Sci. Technol., A 20 4 2002 1347
9. G. Bruno, P. Capezzuto, and M. Losurdo Vacuum 57 2 2000 189
10. F. Massines, P. Ségur, N. Gherardi, C. Khamphan, and A. Ricard Surf. Coat. Technol. 174/175 2003 8
11. C. Oehr, M. Müller, B. Elkin, D. Hegemann, and U. Vohrer Surf. Coat. Technol. 116/119 1999 25
12. T. Belmonte, J.M. Thiébaut, and D. Mézerette J. Phys., D, Appl. Phys. 35 2002 1919
13. A. Schütze, J.Y. Jeong, S.E. Babayan, J. Park, G.S. Selwyn, and R.F. Hicks IEEE Trans. Plasma Sci. 26 1998 1685
14. J.M. Thiébaut, T. Belmonte, and H. Michel Proceedings of the 13th International Colloquium on Plasma Processes 2001 Antibes-Juan-les-Pins France 192
15. S. Huet, T. Belmonte, J.M. Thiébaut, S. Bockel, and H. Michel Proceedings of the 14th International Colloquium on Plasma Processes 2003 Antibes-Juan-les-Pins France 273
16. David R. Lide CRC Handbook of Chemistry and Physics 75th edition 1994-1995 CRC Press London
17. J. Bénard L'oxydation des métaux vol. II 1964 Gauthier-Villars Editeur Paris 231 249 for Ti
18. T.B. Massalski, H. Okamoto, P.R. Subramanian, and L. Kacprzak T.B. Massalski Binary Alloy Phase Diagrams 1990 ASM International Materials Park, Ohio
19. P.S. Ha, H.-J. Youn, H.S. Jung, K.S. Hong, Y.H. Park, and K.H. Ko J. Colloid Interface Sci. 223 2000 16
20. L.E. Depero, P. Bonzi, M. Zocchi, C. Casale, and G. de Michele J. Mater. Res. 8 10 1993 2709
21. K. Okada, K. Katsumata, Y. Kameshima, and A. Yasumori J. Am. Ceram. Soc. 85 8 2002 2078
22. K. Behringer, and U. Fantz New J. Phys. 2 2000 23.1 23.19