Nano silica removal from IC wastewater by pre-coagulation and microfiltration

Water Science and Technology

Volumn 50, Issue 12, 2004, Pages 133-138

  Huang, C ^a   Jiang, W ^a   Chen, C ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Coagulation; Microfiltration; Polyacrylamide; Silica removal; Wastewater

Indexed keywords

CHEMICAL MECHANICAL POLISHING; CHEMICALS REMOVAL (WATER TREATMENT); COAGULATION; FLOCCULATION; MICROFILTRATION; PARTICLE SIZE ANALYSIS; POLYTETRAFLUOROETHYLENES; SILICA;

CATIONIC POLYACRYLAMIDE; COAGULANTS; PERMEATE FLUX; POLY-ALUMINUM CHLORIDE (PACI);

WASTEWATER TREATMENT;

ALUMINUM; CATION; COAGULATING AGENT; NANOPARTICLE; POLITEF; POLYACRYLAMIDE; SILICON DIOXIDE;

COAGULATION; MEMBRANE TECHNOLOGY; POLYACRYLAMIDE; ULTRAFILTRATION; WASTEWATER TREATMENT;

ARTICLE; CHEMICAL PROCEDURES; CONCENTRATION (PARAMETERS); CONTROLLED STUDY; ELECTRONICS INDUSTRY; FLOCCULATION; MEMBRANE FILTER; MICROFILTRATION; PARTICLE SIZE; PRESSURE; PROCESS OPTIMIZATION; VACUUM; WASTE WATER MANAGEMENT; WATER ANALYSIS;

PAA;

EID: 13444261931     PISSN: 02731223     EISSN: None     Source Type: Journal    
DOI: 10.2166/wst.2004.0705     Document Type: Article

References (6)

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3. Jiang, W. and Huang, C. (2002). Effect of pre-coagulation on ultrafiltration of fine particles from CMP process in semiconductor industry. In Preprints of Membranes in Drinking and Industrial Water Production, Mülheim an der Ruhr, Germany, 22-26 September 2002, pp. 519-524.
4. Krulik, G.A., Kramasz, K., Golden, J.H., Small, R.J., Shang, C. and Pagan, L. (2001). Semiconductors: copper CMP wastewater chemistry and treatment, Ultrapure Water, September, pp. 29-38.
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6. Matchett, S.A. (1996). Removing silica from cooling waters with colloidal alumina and dialysis, United