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Volumn 85, Issue 26, 2004, Pages 6362-6364

Weak localization thickness measurements of Si:P delta-layers

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; MAGNETIC FIELDS; MASS SPECTROMETRY; MOLECULAR BEAM EPITAXY; PHOSPHORUS; QUANTUM THEORY; STRUCTURE (COMPOSITION); THERMAL DIFFUSION;

EID: 13444249779     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1842366     Document Type: Article
Times cited : (20)

References (21)
  • 1
    • 0004066963 scopus 로고    scopus 로고
    • E. F.Schubert (Cambridge University Press, London
    • Delta-Doping of Semiconductors, edited by, E. F. Schubert, (Cambridge University Press, London, 1996).
    • (1996) Delta-Doping of Semiconductors, Edited by
  • 5
    • 79956021287 scopus 로고    scopus 로고
    • 0003-6951 10.1063/1.1456949
    • T.-C Shen, J.-Y. Ji, M. A. Zudov, R.-R. Du, J. S. Kline, and J. R. Tucker, Appl. Phys. Lett. 0003-6951 10.1063/1.1456949 80, 1580 (2002); L. Oberbeck, N. J. Curson, M. Y. Simmons, R. Brenner, A. R. Hamilton, S. R. Schofield, and R. G. Clark, Appl. Phys. Lett. 81, 3197 (2002).
    • (2002) Appl. Phys. Lett. , vol.80 , pp. 1580
    • Shen, T.-C.1    Ji, J.-Y.2    Zudov, M.A.3    Du, R.-R.4    Kline, J.S.5    Tucker, J.R.6
  • 7
    • 0037789563 scopus 로고    scopus 로고
    • The resolution limits of SIMS depend in detail on the conditions under which the analysis is performed, see Y. Homma, Surf. Interface Anal. 35, 544 (2003) for a particular example.
    • (2003) Surf. Interface Anal. , vol.35 , pp. 544
    • Homma, Y.1
  • 18
    • 0004255385 scopus 로고
    • 2nd ed. (Minerals, Metals, Materials Society
    • P. Shewmon, Diffusion in Solids, 2nd ed. (Minerals, Metals, Materials Society, 1989).
    • (1989) Diffusion in Solids
    • Shewmon, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.