Nanometre-cutting machine using a Stewart-platform parallel mechanism

Measurement Science and Technology

Volumn 15, Issue 2, 2004, Pages 467-474

  Furutani, Katsushi ^a   Suzuki, Michio ^a   Kudoh, Ryusei ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Atomic force microscope; Calibration; Micro nanoscale pattern formation; Piezoelectric actuator; Positioning

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; MACHINING; MEASUREMENT THEORY; PIEZOELECTRIC DEVICES; POLYNOMIALS; RESINS;

NANOMETER-CUTTING MACHINES;

CUTTING EQUIPMENT;

ATOMIC FORCE MICROSCOPY; CUTTING MACHINE;

EID: 1342329496     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/2/022     Document Type: Article

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