Protrusion formation and surface porosity development on thermally annealed helium implanted copper

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 217, Issue 2, 2004, Pages 262-275

  Escobar Galindo, R ^a,d   Van Veen, A ^a   Evans, J H ^b   Schut, H ^a   De Hosson, J Th M ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b University of Groningen ^*  (United Kingdom)

^c UNIVERSITY OF GRONINGEN   (Netherlands)

^d INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; COALESCENCE; COATINGS; COPPER; HELIUM; PORE SIZE; POROSITY; SINGLE CRYSTALS; SWELLING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

BUBBLE MIGRATION; SURFACE COATINGS; SURFACE PROTRUSIONS;

ION IMPLANTATION;

EID: 1342326177     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.10.012     Document Type: Article

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