Role of oxygen in AlN sublimation growth

Physica Status Solidi C: Conferences

Volumn , Issue 7, 2003, Pages 1989-1992

  Karpov, S Yu ^a   Kulik, A V ^a   Przhevalskii, I N ^b   Ramm, M S ^c   Makarov, Yu N ^d  

^a SOFT IMPACT LTD   (Russian Federation)

^b Prikladnaya Khimiya Russian Scientific Center   (Russian Federation)

^c IOFFE INSTITUTE   (Russian Federation)

^d Semiconduct Technol Research Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; EFFECT OF OXYGEN; HIGH TEMPERATURE; MODERATE TEMPERATURE; SUBLIMATION GROWTH; TEMPERATURE RANGE; THERMODYNAMIC CALCULATIONS;

ALUMINUM; CRYSTAL GROWTH; NITRIDES; OXYGEN; PHASE TRANSITIONS; SUBLIMATION; VAPORS;

ALUMINUM NITRIDE;

EID: 1342299029     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200303354     Document Type: Conference Paper

References (9)

1. G. A. Slack, J. Phys. Chem. Solids 34, 321 (1973).
2. G. A. Slack and T. F. McNelly, J. Cryst. Growth 34, 263 (1976).
3. J. Bermudo, M. I. Osendi, and J. L. G. Fierro, Ceram. Forum. Internat. 26, 141 (2000).
4. G. A. Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, J. Phys. Chem. Solids 48, 641 (1987).
5. R. A. Youngman and J. H. Harris, Jr., J. Am. Ceram. Soc. 73, 3238 (1990).
6. G. A. Slack, L. J. Schowalter, D. Morelli, and J. A. Freitas Jr., J. Cryst. Growth 246, 287 (2002).
7. R. Metselaar and D. S. Yan, Pure Appl. Chem. 71, 1765 (1999).
8. M. V. Averyanova, S. Yu. Karpov, Yu. N. Makarov, I. N. Przhevalskii, M. S. Ramm, and R. A. Talalaev, MRS J. Nitride Semicond. Res. 1, 31 (1996).
9. S. Yu. Karpov, D. V. Zimina, Yu. N. Makarov, E. N. Mokhov, A. D. Roenkov, M. G. Ramm, and Yu. A. Vodakov, phys. stat. sol. (a) 176, 435 (1999).