Design of MEMS via efficient simulation of fabrication

Proceedings of the ASME Design Engineering Technical Conference

Volumn 1, Issue , 1996, Pages

  Hubbard, Ted J ^a   Antonsson, Erik K ^b  

^a DALHOUSIE UNIVERSITY   (Canada)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; NUMERICAL METHODS;

COMPUTATIONALLY EFFICIENT; EFFICIENT SIMULATION; MICRO ELECTRO MECHANICAL SYSTEM; NONIDEAL EFFECTS; SIMULATION EXAMPLE;

MEMS;

EID: 1342297481     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/96-DETC/DFM-1312     Document Type: Conference Paper

References (23)

1. Abu-Zeid, M., 1984, "Corner Undercutting in Anisotropically Etched Isolation Contours," J. Electrochem. Soc., Vol. 131, pp. 2138-2142.
2. Bryzek, J., Petersen, K. E., and McCulley, W., 1994, "Micromachines Made of Silicon," IEEE Spectrum, Vol. 31, (No. 5), pp. 20-31.
3. Buser, R. A., Crary, S. B., and Juma, O. S., 1992, "In- tegration of the anisotropic-silicon-etching program ASEP within the CAEMEMS CAD/CAE framework," In MEMS 92, pp. 133-138 Institute of Electrical Engineers.
4. Buser, R. A., and de Rooij, N. F., 1991, "ASEP: A CAD program for silicon anisotropic etching," Sensors and Actuators, Vol. 28, pp. 71-78.
5. Crary, S. B., and Zhang, Y., 1990, "CAEMEMS: An in- tergrated computer-aided engineering workbench for micro- electro mechanical systems," In MEMS 90, pp. 113-115 Institute of Electrical Engineers.
6. DeLapierre, G., 1992, "Anisotropic crystal etching: A simulation program," Sensors and Actuators, Vol. 31, pp. 267-274.
7. Frank, F. C., and Ives, M. B., 1960, "Orientation- Dependent Dissolution of Germanium," J. Appl. Phys., Vol. 31, (No. 11), pp. 1996-1999.
8. Fruhauf, J., Trautman, K., Wittig, J., and Zeilke, D., 1993, "A simulation tool for orientation dependent etch- ing," J. of Micromechanics and Microengineering, Vol. 3, pp. 113-115.
9. Hubbard, T. J., and Antonsson, E. K., 1994a, "Cel- lular Automata in MEMS Design," Engineering design re- search laboratory report EDRL-TR 94d, California Insti- tute of Technology.
10. Hubbard, T. J., and Antonsson, E. K., 1994b, "Emer- gent Faces in Crystal Etching," Journal of Microelectome- chanical Systems, Vol. 3, (No. 1), pp. 19-28.
11. Kota, S., Ananthasuresh, G. K., Crary, S. B., and Wise, K. D., 1994, "Design and Fabrication of Microelectrome- chanical Systems," ASME Journal of Mechanical Design, Vol. 116, (No. 4), pp. 1081-1088.
12. Maseeh, F., Harris, R., and Senturia, S., 1990, "A CAD architecture for MEMS," In Transducers 90, pp. 44-49 Institute of Electrical Engineers.
13. Offeriens, H. L., Kuhl, K., and Sandmaier, H., 1991, "Methods for the Fabrication of Convex Corners in Anisotropic Etching of (100) Silicon in Aqueous KOH," Sensors and Actuators, Vol. A25-27, pp. 9-13.
14. Pourahmadi, F., and Twerdok, J., 1990, "Modeling Micromachined Sensors with Finite Elements," Machine Design, pp. 44-60.
15. Puers, B., and Sansen, W., 1990, "Compensation Struc- tures for Convex Corner Micromachining in Silicon," Sen- sors and Actuators, Vol. A21-23, pp. 1036-1041.
16. Schwarzenbach, H. U., Korvink, J. G., Roos, M., Sar- toris, G., and Anderheggen, E., 1993, "A micro electro me- chanical CAD extension for SESES," J. of Micromechanics and Microengineering, Vol. 3, pp. 118-122.
17. Senturia, S. D., Harris, R. M., Johnson, B. P., Kim, S., Shulman, M. A., and White, J. K., 1992, "A computer- aided design system for microelectromechanical systems (MEMCAD)," Journal of Microelectomechanical Systems, Vol. 1, pp. 3-13.
18. Sequin, C. H., 1991, "Computer simulation of anisotropic crystal etching," In Transducers '91, pp. 801- 806 San Francisco, CA, USA.
19. Than, O., and Buttgenbach, S., 1994, "Simulation of anisotropic chemical etching of crytalline silicon using a cel- lular automata model," Sensors and Actuators, Vol. A45, pp. 85-89.
20. Trimmer, W. S., and Gabriel, K. J., 1987, "Design Considerations for a Practical Electrostatic Micro-motor," Sensors and Actuators, Vol. 11, pp. 189-206.
21. Wise, K. D., 1991, "Integrated microelectromechanical systems: A perspective on MEMS in the 90s," In MEMS '91, pp. 33-27 Institute of Electrical Engineers.
22. Wise, K. D., and Najafi, K., 1991, "Microfabrication techniques for integrated sensors and microsystems," Sci- ence, Vol. 25, pp. 1335-1342.
23. Zhang, Y., Crary, S. B., and Wise, K. D., 1990, "Pres- sure sensor design and simulation using the CAEMEMS-D module," In Tech. Dig. IEEE Solid-State Sensor and Actu- ator Workshop, pp. 32-35 Institute of Electrical Engineers.