Fabrication and properties of vitreous silica films prepared by flame hydrolysis deposition

Materials Chemistry and Physics

Volumn 84, Issue 2-3, 2004, Pages 234-237

  Wu, Yuan Da ^a   Xing, Hua ^a   Zhang, Le Tian ^a   Li, Ai Wu ^a   Zheng, Wei ^a   Liu, Guo Fan ^a   Guo, Yu Bin ^a   Zhang, Yu Shu ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Fabrication; Flame hydrolysis deposition; Silica films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COOLING; DEPOSITION; ELECTRIC RESISTANCE; FUSED SILICA; HYDROLYSIS; OXIDATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SYNTHESIS (CHEMICAL); VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

FLAME HYDROLYSIS DEPOSITION (FHD); SILICA FILMS;

SILICA;

EID: 1342280958     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00237-2     Document Type: Article

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