Glow discharge pretreatment tools for vacuum web coating

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 735-739

  Geisler, M ^a   Hoffmann, G ^a   Ludwig, R ^a   Steiniger, G ^a  

^a Applied Films GmbH and Co KG   (Germany)

Author keywords

Ion assistance; Large scale; Plasma treatment; RF plasma; Web

Indexed keywords

ATMOSPHERICS; CARRIER CONCENTRATION; COMPOSITION; EVAPORATION; GLOW DISCHARGES; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON TEMPERATURE; METALLIC COATINGS;

VACUUM DEPOSITED COATINGS;

TOOL;

EID: 1342268114     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.014     Document Type: Article

References (7)

1. W. Lohwasser, 43rd SVC Annals of Technical Conference Proceedings (2000), 362
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3. A. Pircada, A.Yializes, W. Decker, R.E. Ellwanger, 42nd SVC Annals of Technical Conference Proceedings (1999), 301
4. Geisler M. Kieser J. Proc. ISPC 1987 14
5. J. Kieser, M. Geisler, J. Sellschopp, US Patent 4767641 (1986)
6. M. Geisler, R. Kukla, J. Bartella, G. Hoffmann, R. Ludwig, D. Wagner, 14th International Vacuum Web Coating Conference (2000), 119
7. D.J. McClure, D.S. Dunn, A.J. Ouderkirk, 43rd SCV Annals of Technical Conference Proceedings (2000) 342