Wavelength tuning of an antenna-coupled infrared microbolometer

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3133-3136

  Gritz, Michael A ^a   Metzler, Meredith ^b   Malocha, Donald ^c   Abdel Rahman, Mohamed ^c   Monacelli, Brian ^c   Zummo, Guy ^c   Boreman, Glenn D ^c  

^a RAYTHEON COMPANY   (United States)

^b Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

^c UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRINGE-FIELD CAPACITANCE; FRINGING EFFECTS; MICROSTRIP DIPOLE ANTENNAS; WORK FUNCTIONS;

CAPACITANCE; ELECTRIC INSULATORS; EQUIVALENT CIRCUITS; FERMI LEVEL; INFRARED DEVICES; MATHEMATICAL MODELS; MICROSTRIP ANTENNAS; MOS CAPACITORS; NATURAL FREQUENCIES; POLARIZATION; POLYMETHYL METHACRYLATES; RESONANCE; SCANNING ELECTRON MICROSCOPY; SILICA; TUNING; VOLTAGE CONTROL;

BOLOMETERS;

EID: 13244298635     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1813465     Document Type: Conference Paper

References (6)

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2. I. Codreanu, C. Fumeaux, D. Spencer, and G. Boreman, Electron. Lett. 35, 2166 (1999).
3. G. Boreman, C. Fumeaux, W. Herrmann, F. Kneubühl, and H. Rothuizen, Opt. Lett. 23, 1912 (1998).
4. R. F. Pierret, Semiconductor Device Fundamentals, Chap. 16 (Addison-Wesley, New York, 1996).
5. S. K. Sharma and B. R. Vishvakarma, Int. J. Electron. 86, 979 (1999).
6. C. Balanis, Antenna Theory Analysis and Design, Chap. 4 (Wiley, New York, 1997).