Invited paper: Design and fabrication of wireless remotely readable MEMS accelerometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3242, Issue , 1997, Pages 36-44

  Varadan, Vijay K ^a   Subramanian, Hareesh ^a   Varadan, Vasundara V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR BAGS; CONFORMAL ANTENNAS; CRASH TESTS; MEMS ACCELEROMETERS; MICROWAVE SYSTEMS; NOISE CONTROLS; POSITIONING SYSTEMS; POWER REQUIREMENTS; ROLL STABILIZATIONS; SAW DEVICES; SILICON MICROMACHINING; SMALL SIZES; STRAIN SENSORS; VIBRATION SENSORS; WHEEL STEERING;

ACCELEROMETERS; ACOUSTIC SURFACE WAVE DEVICES; CONTROL SYSTEMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS;

SENSORS;

EID: 13244280714     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293556     Document Type: Conference Paper

References (7)

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7. V. K. Varadan and P. McWhorter, Smart Electronics and MEMS, SPIE 3046 (1997)