Depth profiling of polycrystalline layers under a surface using x-ray diffraction at small glancing angle of incidence

Surface and Interface Analysis

Volumn 37, Issue 2, 2005, Pages 190-193

  Fujii, Y ^a   Komai, T ^a   Ikeda, K ^b  

^a KOBE UNIVERSITY   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

Depth profiling; Glancing angle incidence; Oxidized iron; Polycrystal; Surface; X ray diffraction

Indexed keywords

CHEMICAL MECHANICAL POLISHING; IRON; LIGHT PROPAGATION; POLYCRYSTALS; REFRACTIVE INDEX; SURFACE MEASUREMENT; X RAY DIFFRACTION;

DEPTH PROFILING; GLANCING ANGLE INCIDENCE; OXIDIZED IRON; X-RAY INTENSITY;

POLYCRYSTALLINE MATERIALS;

EID: 13244273633     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1961     Document Type: Conference Paper

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