Wear and dynamic properties of piezoelectric ultrasonic motor with frictional materials coated stator

Materials Chemistry and Physics

Volumn 90, Issue 2-3, 2005, Pages 391-395

  Ko, Hyun Phill ^a,b   Kim, Sangsig ^b   Kim, Jin Sang ^a   Kim, Hyun Jai ^a   Yoon, Seok Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Coating; DLC; GET; Stator; TiAlN

Indexed keywords

COATED MATERIALS; MOTORS; PIEZOELECTRIC DEVICES; SILICON; STATORS; TORQUE; ULTRASONIC TRANSDUCERS; WEAR OF MATERIALS;

DIAMOND-LIKE CARBON (DLC); GLASS EMBEDDED TEFLON (GET); SILICON-INCORPORATED-DIAMOND LIKE CARBON (SI-DLC); TITANIUM ALUMINIUM NITRIDE (TIAIN);

FRICTION MATERIALS;

EID: 13144259722     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2004.09.037     Document Type: Review

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