SUCCESSFUL DEVELOPMENT OF NON-PLANAR LITHOGRAPHY FOR MICRO-MACHINING APPLICATIONS

Optics InfoBase Conference Papers

Volumn , Issue , 1996, Pages 354-357

  Shmulovich, J ^a   Gates, J V ^a   Kane, C F ^a   Cappuzzo, M A ^a   Szalkowski, J M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 13044276871     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. J. M. Collins,"Printed Circuit Fabrication", 62, March 1991.
2. J. Murray,"Printed Circuit Fabrication", 44, June 1991.
3. Eagle 2100 ED Photoresist Technical Information Sheet, available from Shipley Co.