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Volumn 813, Issue , 2004, Pages
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Hydrogen in Semiconductors
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
CONCENTRATION (PROCESS);
DEUTERIUM;
HYDROGENATION;
ION IMPLANTATION;
ISOTOPES;
MAGNETIC RESONANCE;
MATHEMATICAL MODELS;
MOS DEVICES;
MOSFET DEVICES;
PARAMAGNETIC RESONANCE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
THERMAL EFFECTS;
TRANSMISSION ELECTRON MICROSCOPY;
AMORPHOUS SOLIDS;
BOND ENERGY;
DANGLING BONDS;
DENSITY FUNCTION THEORY (DFT);
EIREV;
GETTERING;
HYDROGEN CONTENTS;
HYDROGEN IONS;
SILICON THIN FILMS;
VIBRATIONAL MODES;
SEMICONDUCTOR MATERIALS;
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EID: 12844280489
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (2)
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References (0)
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