Vibrational lifetimes of hydrogen in silicon: Isotope effects and MOSFET reliability

Materials Research Society Symposium Proceedings

Volumn 813, Issue , 2004, Pages 33-41

  Lüpke, Gunter ^a   Sun, Baozhou ^a   Tolk, Norman H ^b   Feldman, Leonard C ^b  

^a The College of William and Mary   (United States)

^b VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; HAMILTONIANS; ISOTOPES; MOSFET DEVICES; SEMICONDUCTOR MATERIALS; SILICON; VIBRATION MEASUREMENT;

CRYSTALLINE SILICON; MOSFET RELIABILITY; MULTIPHONON RELAXATION; VIBRATIONAL RELAXATION;

SEMICONDUCTOR DEVICES;

EID: 12844277250     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-813-h7.1     Document Type: Conference Paper

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