Cross-section nano-indentation for rapid adhesion evaluation

Materials Research Society Symposium Proceedings

Volumn 812, Issue , 2004, Pages 291-296

  Brongersma, S H ^a   Degryse, Dominiek ^a   Souiller, Jerome ^a   Vandevelde, Bart ^a   Maex, K ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPUTER SIMULATION; COPPER; DELAMINATION; DEPOSITION; DIFFUSION; FINITE ELEMENT METHOD; OPTIMIZATION; PERMITTIVITY; SILICON; SUBSTRATES; TITANIUM COMPOUNDS;

FINITE ELEMENT SIMULATIONS; NANO-INDENTATION; PROCESS OPTIMIZATION; SILICON SUBSTRATES;

INDENTATION;

EID: 12844271093     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-812-f5.5     Document Type: Conference Paper

References (2)

1. Q. Ma, H. Fujimoto, P. Flinn, V. Jain, F. Adibi-Rizi, F. Moghadam, and R. H. Dauskardt. Mater. Res. Soc. Symp. Proc. 391, 91 (1995).
2. J. M. Sanchez, S. El-Mansy, B. Sun, T. Sherban, N. Fang, D. Pantuso, W. Ford, M. R. Elizalde, J. M. Martinez-Esnaola, A. Martin-Meizoso, J. Gil-Sevillano, M. Fuentes, and J. Maiz, Acta Mater. 47, 4405 (1999).