Characterization and mapping of crystal defects in silicon carbide

Materials Research Society Symposium Proceedings

Volumn 815, Issue , 2004, Pages 127-131

  Emorhokpor, E ^a   Kerr, T ^a   Zwieback, I ^a   Elkington, W ^a   Dudley, M ^b   Anderson, T ^a   Chen, J ^a  

^a II VI Inc   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; CRYSTAL DEFECTS; CRYSTALLOGRAPHY; ETCHING; IMAGE PROCESSING; MAPPING; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES; SILICON WAFERS; X RAY ANALYSIS;

BRIGHT FIELD (BF); DARK FIELD (DF) MODES; OPTICAL REFLECTION; SYNCHROTRON WHITE BEAM X RAY TOPOGRAPHY (SWBXT);

SILICON CARBIDE;

EID: 12844264838     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-815-j5.19     Document Type: Conference Paper

References (6)

1. X. R. Huang, M. Dudley, Vetter, W. M. Huang, W. Wang, S. & Carter, C. H. Jr (1999). Appl. Phys. Lett. 74, 353-355.
2. P.G. Neudeck, W. Huang, M. Dudley: IEEE Trans. Electron Devices 46 (1999), p. 478
3. M. Katsuno, N. Ohtani, J. Takahashi, T. Fujimoto, H. Yashiro and M. Kanaya: Jpn. J. Appl. Phys. 38 (1999) 4661.
4. T. Elkington, E. Emorhokpor, T. Kerr, J. Chen, K. Essary, M. Golab, R. Hopkins: Statistical Analysis of Micropipe Defect Distributions in Silicon Carbide Crystals, edited by Editors: J. Chyi, S. J. Pearton, J. Han, A. G. Baca, Wayne H. Chang, Materials Research Society Symposium Proceedings, Vol. 764, C3.29
5. M. Dudley, S. Wang, W. Huang, C. Carter, Jr., V.F. Tsvetkov and C. Fazi: J. Phys. D: Appl. Phys. 28 (1995), p. 96
6. S. Ha, W. M. Vetter, M. Dudley, M. Skowronski: Mat. Sci. For. Vols. 389-393 (2002) pp. 443-446