Cerium oxide abrasives - Observations and analysis

Materials Research Society Symposium Proceedings

Volumn 816, Issue , 2004, Pages 245-256

  Evans, David R ^a  

^a SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; AGGLOMERATION; CHEMICAL MECHANICAL POLISHING; CHEMICAL MODIFICATION; COLLOIDS; ELASTICITY; LUBRICATION; MATHEMATICAL MODELS; SILICA; SLURRIES; SURFACE CHEMISTRY; THIN FILMS;

CERIUM OXIDE; CHEMICAL INTERACTIONS; DIELECTRIC CHEMICAL MECHANICAL POLISHING; POLISHING MODELS;

CERIUM COMPOUNDS;

EID: 12744260666     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-816-k9.1     Document Type: Conference Paper

References (6)

1. M. Nabavi, O. Spalla, and B. Cabane, J. Coll. and Interf. Sci., 160, 459 (1993).
2. S. H. Behrens and D. G. Grier, J. Chem. Phys., 115(14), 6716 (2001).
3. T. Hiemstra, W. H. Van Riemsdijk, and G. H. Bolt, J. Coll. and Interf. Sci., 133, 91 (1989); T. Hiemstra, J. C. M. De Wit, and W. H. Van Riemsdijk, J. Coll. and Interf. Sci., 133, 105 (1989).
4. T. Hiemstra, W. H. Van Riemsdijk, and G. H. Bolt, J. Coll. and Interf. Sci., 133, 91 (1989); T. Hiemstra, J. C. M. De Wit, and W. H. Van Riemsdijk, J. Coll. and Interf. Sci., 133, 105 (1989).
5. L. M. Cook, J. of Non-Crystalline Solids 120, 152, (1990).
6. D. J. Stein, D. L. Hetherington, J. E. Stevens, M. R. Oliver, S. D. Hosali, and D. R. Evans, MRS Meeting-Spring 1999, San Francisco, CA, Apr. 5-9, 1999.