Nano-structural modification of amorphous carbon thin films by low-energy electron beam irradiation

Cailiao Rechuli Xuebao/Transactions of Materials and Heat Treatment

Volumn 25, Issue 5, 2004, Pages 1247-1252

  Iwamura, Eiji ^a   Yamaguchi, Masanori ^b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b USHIO INC   (Japan)

Author keywords

Electron beam; Graphitization; Hybrid carbon film; Sputtering

Indexed keywords

CARBON; ELECTRON BEAMS; GRAPHITIZATION; IRRADIATION; MICROSTRUCTURE; MODIFICATION; SPUTTERING; THERMAL EFFECTS;

CATALYTIC EFFECT; ELECTRON BEAM IRRADIATION; GRAPHITIC STRUCTURE; HYBRID CARBON FILM;

AMORPHOUS FILMS;

EID: 12444324541     PISSN: 10096264     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

1. Chhowalla M, Ahrronov R A, Kiely C J, Alexandrou I and Amaratunga G A J. Generation and Deposition of Fullerene-and Nanotube-rich Carbon Thin Films. Philosophical Magazine Lett., 1997, 75(5): 329-335.
2. Lee C S, Kim T Y, Lee K R, Ahn J P and Yoon K H. Nanocomposite ta-C Films Prepared by The Filtered Vacuum Arc Process Using Nanosized Ni Dots on a Si Substrate. Chem. Phys. Lett., 2003, 380: 774-779.
3. Ugarte D. Curling and Closure of Graphitic Networks under Electron-beam Irradiation. Nature, 1992, 359: 707-709.
4. Sjostrom H, Stafstrom S, Boman M and Sundgren J-E. Superhard and Elastic Carbon Nitride Thin Films Having Fullerenelike Microstructure. Phys. Rev. Lett., 1995, 75: 1336-1339.
5. Amaratunga G A J, Chhowalla M, Kiely C J, Alexandrou I, Ahrronov R and Devenish R M. Hard Elastic Carbon Thin Films from Linking of Carbon Nanoparticles. Nature, 1996, 383: 321-323.
6. Burden A P and Silva S R P. Fullerene-like Carbon nanoparticles Generated by Radio-frequency Plasma-enhanced Chemical Vapor Deposition. Philosophical Magazine Lett, 1998, 78(1): 15-19.
7. Lavrentiev V, Abe H, Yamamoto S, Naramoto H and Narumi K. Formation of Carbon Nanotubes under Conditions of Co+C60 Film. Physica B, 2002, 323: 303-305.
8. Fujita J, Ishida M, Ichihashi T, Ochiai Y, Kaito T and Matsui S. Graphitization of Fe-doped Amorphous Carbon Pillers Grown by Focused-ion-beam-induced Chemical-vapor Deposition. J. Vac. Sci. Technol., 2002, B20: 2686-2689.
9. Schiller S. Electron Beam Technology. John Wiley and Sons, 1983.
10. Banhart F, Redlich P and Ajayan P M. The migration of Metal Atoms through Carbon Onions. Chem. Phys. Lett., 1998, 292: 554-560.
11. Banhart F, Grobert N, Terrones M, Charlier J C and Ajayan P M. Metal Atoms in Carbon Nanotubes and Related Nanoparticles. International J. Modern Physics, 2001, B15: 4037-4069.
12. Iwamura E. Structural Ordering of Metal-containing Amorphous Carbon Thin Films Induced by Low-energy Electron Beam Projection. Rev. Adv. Mater. Sci., 2003, 5: 34-40.
13. Iwamura E. Evolution of Graphitic Structures in Amorphous Carbon Thin Films. Extended Abstract Inter. Conf. Carbon 2004, Providence USA, July 11-16 2004. (CD ROM)
14. Robertson J. Diamond-like Amorphous Carbon. Materials Science and Engineering, 2002, R37: 129-281.
15. Thornton J A. High Rate Thick Film Growth. Ann. Rev. Mater. Sci., 1977, 7: 239-260.
16. Messier R, Giri A P and Roy P A. Revised Structure Zone Model for Thin Film Physical Structure. J. Vac. Sci. Technol., 1984, A2: 500-503.
17. Iwamura E. Characterization of Nanometer-scale Columns and low-density Boundary Network Structures in Hydrogenated Amorphous Carbon Films. Ceramic Transaction, 2003, 148: 139-146.